Immersion Lithography : Promises, Challenges, and Solutions

Abstract

This paper will introduce lithography, and the issues that are contributing to the development of immersion lithography. We will explain the advantages of immersion lithography and its problems, and try to consider its future. Immersion Lithography is an optical lithography technique that promises to enhance the resolution capabilities of current systems. This technology is attractive to the semiconductor industry because it will delay or make obsolete a costly switchover to the extreme ultraviolet process (EUV).